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Low-k dielectric
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11	1 Table INTC1 2013 Interconnect Difficult Challenges Add to Reading List Source URL: public.itrs.net Language: English - Date: 2014-03-27 14:19:04 Metrology Low-k dielectric Materials science International Technology Roadmap for Semiconductors
12	six0512low.qxd[removed]:50 PM Add to Reading List Source URL: sgw.com Language: English - Date: 2012-02-08 11:10:47 Microtechnology Cleaning Supercritical fluid Etching Dry cleaning Low-k dielectric Wet cleaning Resist Matter Semiconductor device fabrication Materials science Technology
13	1 Table INTC1 2013 Interconnect Difficult Challenges Add to Reading List Source URL: www.itrs.net Language: English - Date: 2014-03-27 14:19:04 Metrology Low-k dielectric Materials science International Technology Roadmap for Semiconductors
14	INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS[removed]EDITION Add to Reading List Source URL: www.itrs.net Language: English - Date: 2014-03-27 14:06:28 International Technology Roadmap for Semiconductors Integrated circuit Electronic engineering 16 nanometer 180 nanometer 90 nanometer 22 nanometer Microtechnology Low-k dielectric Materials science
15	only free electrons, as in metals, can respond to the electric field. That is why metals are such good optical reflectors! For nonequilibrium phenomena, the combination of Maxwell’s equations and the continuity equatio Add to Reading List Source URL: www.electrochem.org Language: English - Date: 2012-04-20 11:04:24 Materials science Physical quantities Low-k dielectric High-k dielectric Capacitor Dielectric Relative permittivity Semiconductor device fabrication Capacitance Electromagnetism Physics Electricity
16	six0512low.qxd[removed]:50 PM Add to Reading List Source URL: sgw.com Language: English - Date: 2012-02-08 11:04:15 Microtechnology Cleaning Supercritical fluid Etching Dry cleaning Low-k dielectric Wet cleaning Resist Matter Semiconductor device fabrication Materials science Technology
17	six0512low.qxd[removed]:50 PM Add to Reading List Source URL: www.sgw.com Language: English - Date: 2012-02-08 11:10:47 Microtechnology Cleaning Supercritical fluid Etching Dry cleaning Low-k dielectric Wet cleaning Resist Matter Semiconductor device fabrication Materials science Technology
18	six0512low.qxd[removed]:50 PM Add to Reading List Source URL: www.sgw.com Language: English - Date: 2012-02-08 11:04:15 Microtechnology Cleaning Supercritical fluid Etching Dry cleaning Low-k dielectric Wet cleaning Resist Matter Semiconductor device fabrication Materials science Technology
19	PDF Document Add to Reading List Source URL: www.gaas.org Language: English - Date: 2010-08-11 20:37:36 Electronic engineering Back end of line Chemical vapor deposition Integrated circuit Titanium nitride Capacitor Electromigration Low-k dielectric Semiconductor device fabrication Technology Chemistry